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Axiospect 202
Wafer inspection and Review System
Advanced 200 mm optical inspection and review tool with up to four wafer handling interfaces.
Suitable for SMIF- and non-SMIF environments.
Front- and back side inspection and review.
Sorter function, also with back side flip.
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Axiospect 301
Wafer inspection and Review System
Successor to the well established, reliable 300 mm inspection and review tool Axiospect 300
Front- and back side inspection and review.
Sorter function, also with back side flip.
Edge-grip design for wafer handling ensures less contamination on wafer back side.
Integrated flip module on robot.
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Axiotron 2
Microscope
Brightfield, Darkfield, Differential Interference Contrast
Real-time White-light Confocal Mode (CSM)
Brightfield UV (i-line, DUV)
Fluorescence
Polarization Microscopy
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OEM Components
Microscope in Third Party Tools
Microscopes: Zeiss Axiotron 2 and Axiotron 300
Illumination solutions (Micro and Macro)
Microscope components (filters, reflectors, objectives)
Macro inspection module
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