XVision 300DB / TB

FIB / SEM Double Beam System
FIB / SEM / Ar Triple Beam System

Based on the high performance automation platform of SIINTLs SMI3000 series, this new product is equipped with the SIINT's latest FIB column and Gemini column of Carl Zeiss, achieving highly precise processing with less damage compared with conventional models, and 3nm SEM resolution.

SMI3000 Series

High Performance FIB System

This FIB system meets wide range of needs, from high resolution observation,
processing to lamella preparation of various material.
It can conduct highly precise observation and processing at high speed.

SIR5000

Mask Repair System

IR5 is a system developed for repairing large size clear defects beyond 10µm on
photomasks with focused ion beam. Combination of cutting-edge platform and
SIINT's accumulated reparing technology makes highly precise defect repair possible.